Conductive antireflection film and conductive antireflection glass

ABSTRACT

In a conductive antireflection film having predetermined optical characteristics, of the layers of the conductive antireflection film, two layers located on the transparent substrate side are replaced with a three-layered film having a metal oxide film as an intermediate layer thereof. In this three-layered film, when k i  =4n i  d i  /λ 0  (where n i  is the refractive index of the ith layer, di is the geometric thickness of the ith layer, and λ 0  is a middle wavelength in design), the metal oxide film as the second layer satisfies k 2  ≧0.01, and an ITO film as the first layer satisfies k 1  ≧0.1.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a conductive antireflection film stacked on a transparent substrate to reduce reflection of light by the surface of the transparent substrate.

2. Description of the Prior Art

In a CRT of a television receiver or the like, a conductive antireflection film is used to prevent an image from being obscured by reflection of external light or prevent an electric discharge from occurring between the CRT and a human body or the like owing to charging during an operation.

As such a conductive antireflection film, the present applicant proposed a four-layered conductive antireflection film in Japanese Patent Publication No. 4-15443. This film is formed by sequentially stacking an ITO layer, an MgF₂ film, a TiO₂ compound film and an MgF₂ film on a transparent substrate in the order named.

The basic arrangement of the four-layered conductive antireflection film will be described below. Letting n_(i) be the refractive index of the ith layer d_(i) is the geometric thickness of the ith layer and k_(i) is the value obtained by dividing an optical film thickness (n_(i) d_(i)) by a 1/4 wavelength (λ₀ /4), the following equation can be established:

    k.sub.i =4n.sub.i d.sub.i /λ.sub.0

λ₀ is the middle wavelength in design. If the value obtained by letting the-value k_(i) contain an incident angle Θ as a parameter is represented by δ_(i), then

    δ.sub.i =2πn.sub.i d.sub.i cosΘ/λ.sub.0

In this case, as indicated by "Prior Art" in Table 1, the optimal basic arrangement of a film that satisfies required optical and electrical characteristics are designed such that the k values of the first to fourth layers are defined as follows: k₁ =0.38, k₂ =0.27, k₃ =2.10 and k₄ =1.00, provided that a first layer 31 as an ITO layer, a second layer 32 as an MgF₂ film, a third layer 33 as a TiO₂ compound film and a fourth layer 34 as an MgF₂ film are stacked on a transparent substrate 10 in the order named, as shown in FIG. 1.

The preferable ranges of these k values are:

0.93≦k₄ ≦1.05

1.97≦k₃ ≦2.15

0.25≦k₂ ≦0.37

0.34≦k₁ ≦0.50

Note that the film thickness range of a given layer is determined as an allowable film thickness range based on the assumption that the thicknesses of the remaining layers are accurately controlled within the respective film thickness ranges defined in the basic arrangement of the film.

FIG. 2 shows the spectral reflectance of the conventional film shown in Table 1. Note that the film arrangements in Tables 1 and 2 are expressed by the k values. As is apparent from FIG. 2, in the wavelength range of about 430 nm to 680 nm, the reflectance is 0.3% or less, exhibiting excellent optical characteristics. In addition, the sheet resistance is 300 Ω/□ or less, exhibiting excellent electrical characteristics.

Although the above-described conventional film has excellent optical and electrical characteristics, the film is scratched by a load of 300 gf in a scratch test using the tip of a mechanical pencil as a test indenter.

SUMMARY OF THE INVENTION

The first conductive antireflection film of the present invention comprises a first layer composed of an ITO film which is stacked on a surface of a transparent substrate to satisfy 0.1≦k_(i) when k_(i) =4n_(i) d_(i) /λ₀ where n_(i) is a refractive index of an ith layer, d_(i) is a geometric thickness of the ith layer, and λ₀ is a middle wavelength in design, a second layer composed of a metal oxide film which is stacked on the first layer to satisfy 0.01≦k₂ and is transparent in a visible region, a third layer composed of an MgF₂ film stacked on the second layer, a fourth layer stacked on the third layer to satisfy 1.97≦k₄ ≦2.15, and a fifth layer stacked on the fourth layer to satisfy 0.93≦l₅ ≦1.05, wherein a reflectance in a wavelength range of 430 nm to 650 nm is not more than 0.3%.

In the first conductive antireflection film having such an arrangement, the sequentially stacked first to fifth layers have a predetermined relationship, while the second layer satisfies k₂ ≧0.01 and the first layer satisfies k₁ ≧0.01, so that a higher film strength than that of the conventional film can be obtained while excellent optical and electrical characteristics are maintained.

The second conductive antireflection film of the present invention comprises a first layer composed of an ITO film which is stacked on a surface of a transparent substrate to satisfy 0.1≦k₁ when k_(i) =4n_(i) d_(i) /λ₀ where n_(i) is a refractive index of an ith layer, d_(i) is a geometric thickness of the ith layer, and λ₀ is a middle wavelength in design, a second layer composed of a metal oxide film which is stacked on the first layer to satisfy 0.01≦k₂ and is transparent in a visible region, a third layer composed of an MgF₂ film stacked on the second layer, a fourth layer stacked on the third layer to satisfy 0.70≦k₄ ≦0.80, a fifth layer stacked on the fourth layer to satisfy 0.18≦k₅ ≦0.24, a sixth layer stacked on the fifth layer to satisfy 0.68≦k₆ ≦0.80, and a seventh layer stacked on the sixth layer to satisfy 1.02≦k₇ ≦1.12, wherein a reflectance in a wavelength range of 430 nm to 650 nm is not more than 0.3%.

In the second conductive antireflection film having such an arrangement, the sequentially stacked first to seventh layers have a predetermined relationship, while the second layer satisfies k₂ ≧0.01 and the first layer satisfies k₁ ≧0.1, so that a higher film strength than that of the conventional film can be obtained while excellent optical and electrical characteristics are maintained.

In such a conductive antireflection film of the present invention, a two-layered film of a basic arrangement having predetermined optical characteristics on the transparent substrate side is replaced with a three-layered film having an optical admittance equivalent to that of the two-layered film, and this three-layered film is constituted by an ITO layer located on the transparent substrate side, a transparent metal oxide layer stacked on the ITO layer and an MgF₂ layer stacked on the metal oxide layer. By setting the k value of the ITO layer to be larger than a predetermined value, an antistatic function can be obtained. In addition, by setting the k value of the metal oxide film to be larger than a predetermined value, scratching can be prevented even with a load of 300 gf. Therefore, the required optical characteristics, electrical characteristics and film strength can be achieved at the same time.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing the basic film arrangement of a conventional four-layered conductive antireflection film;

FIG. 2 is a graph showing the spectral reflectance of the conventional film;

FIG. 3 is a view for explaining a five-layered conductive antireflection film according to the first embodiment of the preset invention;

FIG. 4 is a graph showing the optical admittances of the conventional film and Example 3;

FIG. 5 is a graph showing the spectral reflectance of Example 1;

FIG. 6 is a graph showing the spectral reflectance of Example 2;

FIG. 7 is a graph showing the spectral reflectance of Example 3;

FIG. 8 is a graph showing the spectral reflectance of Example 4;

FIG. 9 is a graph showing the spectral reflectance of Example 5;

FIG. 10 is a graph showing the spectral reflectance of Example 6;

FIG. 11 is a graph showing the spectral reflectance of Example 7;

FIG. 12 is a graph showing the spectral reflectance of Example 8;

FIG. 13 is a graph showing the spectral reflectance of Comparative Example 1;

FIG. 14 is a graph showing the spectral reflectance of Comparative Example 2;

FIG. 15 is a graph showing the spectral reflectance of Comparative Example 3;

FIG. 16 is a view for explaining a seven-layered conductive antireflection film according to the second embodiment of the present invention;

FIG. 17 is a view showing a basic six-layered film arrangement;

FIG. 18 is a graph showing the optical admittances of the basic six-layered film arrangement and Example 11;

FIG. 19 is a graph showing the optical admittances of the basic six-layered film arrangement and Example 13;

FIG. 20 is a graph showing the spectral reflectance of Example 9;

FIG. 21 is a graph showing the spectral reflectance of Example 10;

FIG. 22 is a graph showing the spectral reflectance of Example 11;

FIG. 23 is a graph showing the spectral reflectance of Example 12;

FIG. 24 is a graph showing the spectral reflectance of Example 13;

FIG. 25 is a graph showing the spectral reflectance of Example 14;

FIG. 26 is a graph showing the spectral reflectance of Example 15;

FIG. 27 is a graph showing the spectral reflectance of Example 16;

FIG. 28 is a graph showing the spectral reflectance of Comparative Example 4;

FIG. 29 is a graph showing the spectral reflectance of Comparative Example 5; and

FIG. 30 is a graph showing the spectral reflectance of Comparative Example 6.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will be described below with reference to the accompanying drawings. As shown in FIG. 3, a five-layered conductive antireflection film according to the first embodiment of the present invention is constituted by first to fifth layers 11 to 15 sequentially stacked on a transparent substrate 10 in the order named.

This five-layered conductive antireflection film is designed such that an optical admittance almost equivalent to that of the first and second layers 31 and 32 of the above-described basic arrangement of the PG,10 four-layered conductive antireflection film is realized by three layers including an adhesive layer, i.e., a first layer 11, a second layer (adhesive layer) 12, and a third layer 13.

If the equivalent optical admittance of the first and second layers 31 and 32 of the four-layered conductive antireflection film is represented by Y₄, then

    Y.sub.4 =C/B

In this case, B and C are expressed as follows: ##EQU1## where n_(s) is the refractive index of the transparent substrate 10 consisting of transparent glass.

Note that M_(i) in this equation is the characteristic matrix of the ith layer of the conductive antireflection film and is expressed as follows: ##EQU2##

If the optical admittance of the first to third layers 11 to 13 of the five-layered conductive antireflection film is represented by Y₅ ' then

    Y.sub.5 =C/B

In this case, B and C are expressed as follows: ##EQU3##

The arrangement of the five-layered conductive antireflection film, therefore, can be determined by determining δ₃ and δ₁ (i.e., n₃, d₃, n₁ and d₁) such that Y₅ =Y₄ after the second layer as the adhesive layer is inserted.

In this case, the lower limit of the thickness of the adhesive layer is determined in consideration of film strength, whereas the upper limit of the thickness is determined in consideration of the sheet resistance (antistatic function) of an ITO layer. The reasons why this upper limit is determined in consideration of the sheet resistance (antistatic function) of the ITO layer are that the thickness of the ITO layer needs to be reduced to set the equivalent optical admittance as the thickness of the adhesive layer increases, and the lower limit of the thickness of the ITO film is determined in consideration of sheet resistance (antistatic function).

When the first and second layers 31 and 32 of the basic arrangement of the four-layered conductive antireflection film are replaced with three layers having an equivalent optical admittance in the above-described manner as shown in FIG. 3, and conditions to be described later are satisfied, a conductive antireflection film according to the first embodiment of the present invention can be obtained. FIG. 4 shows the optical admittances of the first and second layers of the conventional film and the first to third layers of Example 3 shown in Table 1. Referring to FIG. 4, the solid curve indicates the optical admittance of the first and second layers of the conventional film; and the broken curve, the optical admittance of the first to third layers of Example 3. These curves are superposed on each other. That is, these optical admittances are equivalent to each other.

Table 1 shows Examples 1 to 8 of the first embodiment, and Comparative Examples 1 to 3. Note that the numerical values of the respective film arrangements in Tables 1 and 2 are the k_(i) values.

In Table 1, in the item "Electrical Characteristics", "⊚" indicates a film having a sheet resistance of 300 Ω/□ or less, and "∘" indicates a film having a sheet resistance of 300 Ω/□ or more but having an antistatic function.

In addition, in the item "Film Strength", "⊚" indicates a film which is not scratched by a load of 500 gf in a scratch test using the tip of a mechanical pencil as a test indenter, and "∘" indicates a film which is scratched by a load of 500 gf but is not scratched by a load of 300 gf.

In the item "Optical Characteristics", "⊚" indicates a film which can realize a reflectance of 0.3% or less in at least a wavelength range of 430 nm to 650 nm, and "∘" indicates a film which can almost realize a reflectance of 0.3% or less in the same wavelength range.

Each of Examples 1 to 5 uses a PrTiO₃ layer as the second layer 12 serving as the adhesive layer. Example 6 uses an SiO₂ layer as the second layer 12. Example 7 uses an Al₂ O₃ layer as the second layer 12. Example 8 uses a TiO₂ layer as the second layer 12.

As is apparent from Table 1, each of Examples 1 to 8 has a high film strength while maintaining excellent optical and electrical characteristics. Note that FIGS. 5 to 12 respectively show the spectral reflectances of Examples 1 to 8.

In contrast to this, in Comparative Example 1, the k value of the fifth layer of Example 3 is set to be a small value of 0.92. According to Comparative Example 1, although excellent electrical characteristics and a high film strength can be obtained, a reflectance of 0.3% or less cannot be realized in the range of 430 nm to 650 nm. That is, Comparative Example 1 is inferior to Example 3 in terms of optical characteristics.

In Comparative Example 2, the k value of the first layer is set to be 0.07 so as to let the first to third layers have the equivalent optical admittance. According to Comparative Example 2, although excellent optical characteristics and a high film strength can be obtained, an antistatic function cannot be obtained because the sheet resistance cannot be reduced. That is, Comparative Example 2 is inferior to Examples 1 to 8 in terms of electrical characteristics.

In Comparative Example 3, the k value of the second layer is set to be 0.008 so as to let the first to third layers have the equivalent optical admittance. According to Comparative Example 3, although excellent optical and electrical characteristics can be obtained, a scratch is made by a load of 300 gf in a scratch test. That is, Comparative Example 3 is inferior to Examples 1 to 8 in terms of film strength. Note that FIGS. 13 to 15 respectively show the spectral reflectances of Comparative Examples 1 to 3.

As is apparent from Table 1, the k_(i) values which satisfy all the requirements associated with optical characteristics, electrical characteristics and film strength must be set in such a manner that the first layer as an ITO layer stacked on the surface of a transparent substrate satisfies k₁ ≧0.1; the second layer as a metal oxide film which is stacked on the first layer and is transparent in the visible region satisfies k₂ ≧0.01; the fourth layer stacked on the third layer on the second layer satisfies 1.97≦k₄ ≦2.15; and the fifth layer stacked on the fourth layer satisfies 0.93≦k₅ ≦1.05.

A seven-layered conductive antireflection film according to the second embodiment of the present invention will be described next with reference to FIG. 16. In the optimal basic arrangement of a six-layered conductive antireflection film that satisfies the required optical and electrical characteristics, the k values of the first to sixth layers are defined as follows: k₁ =0.35, k₂ =0.32, k₃ =0.75, k₄ =0.21, k₅ =0.75 and k₆ =1.08, provided that a first layer 41, a second layer 42, a third layer 43, a fourth layer 44, a fifth layer 45 and a sixth layer 46 are stacked on a transparent substrate 10 in the order named, as shown in FIG. 16.

The preferable ranges of these k_(i) values are:

1.02≦k₆ ≦1.12

0.68≦k₅ ≦0.80

0.18≦k₄ ≦0.24

0.70≦k₃ ≦0.80

0.27≦k₂ ≦0.37

0.30≦k₁ ≦0.42

FIG. 17 shows the spectral reflectance of the six-layered conductive antireflection film having this basic arrangement.

The seven-layered conductive antireflection film according to the second embodiment of the present invention is designed such that an optical admittance almost equivalent to that of the first and second layers 41 and 42 of the basic arrangement of the six-layered film is realized by a first layer 21, a second layer 22 as an adhesive layer and a third layer 23 of the seven-layered film in the same manner as in the case of the above-described development from the four-layered film to the five-layered film.

In this case, similar to the five-layered conductive antireflection film, the lower limit of the thickness of the adhesive layer as the second layer 22 is determined in consideration of film strength, whereas the upper limit of the thickness is determined in consideration of the sheet resistance (antistatic function) of an ITO layer as the first layer 21.

When the first and second layers 41 and 42 of the basic arrangement of the six-layered film are replaced with the three layers 21 to 23 having the equivalent optical admittance, as shown in FIG. 16, and conditions to be described later are satisfied, a conductive antireflection film according to the second embodiment of the present invention can be obtained.

FIG. 18 shows the optical admittance of the first and second layers 41 and 42 of the basic arrangement of the six-layered film, and that of the first to third layers 21 to 23 of Example 11 in Table 2. Referring to FIG. 18, the sold curve represents the optical admittance of the first and second layers of the basic arrangement of the six-layered film; and the broken curve, the optical admittance of the first to third layers of Example 11. These curve are superposed on each other. That is, the optical admittances are equivalent to each other.

FIG. 19 shows the optical admittance of the first and second layers 41 and 42 of the basic arrangement of the six-layered film, and that of the first to third layers 21 to 23 of Example 13. Referring to FIG. 19, the solid curve represents the optical admittance of the first and second layers 41 and 42 of the basic arrangement of the six-layered film; and broken curve, the optical admittance of the first to third layers 21 to 23 of Example 13. These optical admittances are almost equivalent to each other. As is apparent from the spectral reflectance curve in FIG. 24, even with this degree of difference in optical admittance, a reflectance of 0.3% or less can be realized in the wavelength range of 430 nm to 650 nm.

As is apparent from Table 2, each of Examples 9 to 16 of the second embodiment has a high film strength while maintaining excellent optical and electrical characteristics. FIGS. 20 to 27 respectively show the spectral reflectances of Examples 9 to 16.

In contrast to this, Comparative Example 4 is designed such that the k value of the seventh layer of Example 11 is set to be a large value of 1.14. According to Comparative Example 4, although excellent electrical characteristics and a high film strength can be obtained, a reflectance of 0.3% or less cannot be realized in the wavelength range of 430 nm to 650 nm. That is, Comparative Example 4 is inferior to Example 11 in terms of optical characteristics.

In Comparative Example 5, the k value of the first layer is set to be 0.07 so as to let the first to third layers have the equivalent optical admittance. According to Comparative Example 5, although excellent optical characteristics and a high film strength can be obtained, an antistatic function cannot be obtained because the sheet resistance cannot be reduced. That is, Comparative Example 5 is inferior to Examples 9 to 16 in terms of electrical characteristics.

In Comparative Example 6, the k value of the second layer is set to be 0.008 so as to let the first to third layers have the equivalent optical admittance. According to Comparative Example 6, although excellent optical and electrical characteristics can be obtained, a scratch is made by a load of 300 gf in a scratch test. That is, Comparative Example 6 is inferior to Examples 9 to 16 in terms of film strength. Note that FIGS. 28 to 30 respectively show the spectral reflectance of Comparative Examples 4 to 6.

As is apparent from Table 2, the k_(i) values which satisfy all the requirements associated with optical characteristics, electrical characteristics and film strength must be set in such a manner that the first layer as an ITO layer stacked on the surface of a transparent substrate satisfies k₁≧ 0.01; the second layer as a metal oxide film which is stacked on the first layer and is transparent in the visible region satisfies k₂ ≧0.01; the fourth layer stacked on the third layer on the second layer satisfies 0.07≦k₄ ≦0.80; the fifth layer stacked on the fourth layer satisfies 0.18≦k₅ ≦0.24; the sixth layer stacked on the fifth layer satisfies 0.68≦k₆ ≦0.80; and the seventh layer stacked on the sixth layer satisfies 1.02≦k₇ ≦1.12.

Note that the film thickness range of a given layer is determined as an allowable film thickness range based on the assumption that the thicknesses of the remaining layers are accurately controlled within the respective film thickness ranges defined in the basic arrangement of the film.

In the above-described case, when the wavelength is 520 nm, the refractive index of a PrTiO₃ layer is 2.15; the refractive index of an SiO₂ layer, 1.46; the refractive index of an Al₂ O₃ layer, 1.63; and the refractive index of a TiO₂ layer, 2.35.

In the above-described embodiments, the respective layers were formed by the vacuum deposition. Table 3 shows the deposition conditions for the respective layers. Note that the respective layers may be formed by other methods such as sputtering upon changing the conditions.

                                      TABLE 1                                      __________________________________________________________________________               FILM ARRANGEMENT               ELEC CHRST                                      1ST  2ND  3RD  4TH  5TH  OPTICAL                                                                              (SHEET RES)                                                                            FILM                                    LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                                                               CHRST (Ω/□)                                                                 STRENGTH                      __________________________________________________________________________     EXAMPLE 1 ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ◯                           0.36 0.01 0.28 2.10 1.00       [156]                                 EXAMPLE 2 ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚                        0.30 0.05 0.30 2.10 1.00       [188]                                 EXAMPLE 3 ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚                        0.21 0.10 0.32 2.10 1.00       [268]                                 EXAMPLE 4 ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ◯                                                                          ⊚                        0.12 0.15 0.34 2.10 1.00       [469]                                 EXAMPLE 5 ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ◯                                                                        ◯                                                                          ⊚                        0.10 0.20 0.38 2.10 1.00       [563]                                 EXAMPLE 6 ITO  SiO.sub.2                                                                           MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚                        0.37 0.05 0.23 2.10 1.00       [152]                                 EXAMPLE 7 ITO  Al.sub.2 O.sub.3                                                                    MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚                        0.35 0.05 0.25 2.10 1.00       [161]                                 EXAMPLE 8 ITO  TiO.sub.2                                                                           MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚                        0.28 0.05 0.31 2.10 1.00       [152]                                 COMPARATIVE                                                                              ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           X ⊚                                                                   ⊚                      EXAMPLE 1 0.21 0.10 0.32 2.10 0.92                                             COMPARATIVE                                                                              ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     X       ⊚              EXAMPLE 2 0.07 0.18 0.35 2.10 1.00                                             COMPARATIVE                                                                              ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       X                             EXAMPLE 3 0.37  0.008                                                                              0.27 2.10 1.00                                             __________________________________________________________________________                 1ST  2ND     3RD  4TH                                                          LAYER                                                                               LAYER   LAYER                                                                               LAYER                                            __________________________________________________________________________     PRIOR ART   ITO  MgF.sub.2                                                                              PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       X                                         0.38 0.27    2.10 1.00                                             __________________________________________________________________________

                                      TABLE 2                                      __________________________________________________________________________            FILM ARRANGEMENT                         ELEC CHRST                            1ST  2ND  3RD  4TH  5TH  6TH  7TH  OPTICAL                                                                              (SHEET RES)                                                                            FILM                          LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                                                               CHRST (Ω/□)                                                                 STRENGTH               __________________________________________________________________________     EXAMPLE                                                                               ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ◯          9      0.33 0.01 0.33 0.75 0.21 0.75 1.08       [171]                          EXAMPLE                                                                               ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚       10     0.27 0.05 0.35 0.75 0.21 0.75 1.08       [209]                          EXAMPLE                                                                               ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚       11     0.18 0.10 0.37 0.75 0.21 0.75 1.08       [313]                          EXAMPLE                                                                               ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ◯                                                                          ⊚       12     0.11 0.15 0.39 0.75 0.21 0.75 1.08       [512]                          EXAMPLE                                                                               ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ◯                                                                        ◯                                                                          ⊚       13     0.10 0.20 0.43 0.75 0.21 0.75 1.08       [563]                          EXAMPLE                                                                               ITO  SiO.sub.2                                                                           MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚       14     0.34 0.05 0.28 0.75 0.21 0.75 1.08       [166]                          EXAMPLE                                                                               ITO  Al.sub.2 O.sub.3                                                                    MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚       15     0.32 0.05 0.30 0.75 0.21 0.75 1.08       [176]                          EXAMPLE                                                                               ITO  TiO.sub.2                                                                           MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       ⊚       16     0.25 0.05 0.36 0.75 0.21 0.75 1.08       [225]                          COMPARA-                                                                              ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           X     ⊚                                                                       ⊚       TIVE EX-                                                                              0.18 0.10 0.37 0.75 0.21 0.75 1.14                                      AMPLE 4                                                                        COMPARA-                                                                              ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     X       ⊚       TIVE EX-                                                                              0.07 0.19 0.39 0.75 0.21 0.75 1.08                                      AMPLE 5                                                                        COMPARA-                                                                              ITO  PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       X                      TIVE EX-                                                                              0.34  0.008                                                                              0.32 0.75 0.21 0.75 1.08                                      AMPLE 6                                                                        __________________________________________________________________________              1ST  2ND     3RD  4TH  5TH  6TH                                                LAYER                                                                               LAYER   LAYER                                                                               LAYER                                                                               LAYER                                                                               LAYER                                     __________________________________________________________________________     PRIOR ART                                                                               PrTiO.sub.3                                                                         MgF.sub.2                                                                              PrTiO.sub.3                                                                         MgF.sub.2                                                                           PrTiO.sub.3                                                                         MgF.sub.2                                                                           ⊚                                                                     ⊚                                                                       X                               0.35 0.32    0.75 0.21 0.75 1.08                                      __________________________________________________________________________

                                      TABLE 3                                      __________________________________________________________________________            RESIDUAL                                                                              DEPOSITION                                                                             OXYGEN PARTIAL                                                                            SUBSTRATE                                     LAYER  GAS    RATE    PRESSURE   TEMP    VAPOR                                 MATERIAL                                                                              (Pa)   (nm/sec)                                                                               (Pa)       (°C.)                                                                           SOURCE                                __________________________________________________________________________     MgF.sub.2                                                                             <1.3 × 10.sup.-3                                                                1.1     --         300     MgF.sub.2                             PrTiO.sub.3                                                                           <1.3 × 10.sup.-3                                                                0.8     1.0 × 10.sup.-2                                                                     300     PrTiO.sub.3                           ITO    <1.3 × 10.sup.-3                                                                0.05    8.0 × 10.sup.-2                                                                     300     ITO                                   SiO.sub.2                                                                             <1.3 × 10.sup.-3                                                                1.0     --         300     SiO.sub.2                             Al.sub.2 O.sub.3                                                                      <1.3 × 10.sup.-3                                                                0.5     1.0 × 10.sup.-2                                                                     300     Al.sub.2 O.sub.3                      TiO.sub.2                                                                             <1.3 × 10.sup.-3                                                                0.3     1.3 × 10.sup.-2                                                                     300     Ti.sub.2 O.sub.3                      __________________________________________________________________________ 

What is claimed is:
 1. A conductive antireflection material comprising:a transparent substrate; a first layer composed of an ITO film which is stacked on a surface of the transparent substrate to satisfy 0.1≦k_(I) when k_(i) =4n_(i) d_(i) /λ_(o) where n_(i) is a refractive index of an ith layer, d_(i) is a geometric thickness of the ith layer, and λ_(o) is a middle wavelength in design; a second layer composed of a metal oxide film which is stacked on said first layer to satisfy 0.01≦k₂ and is transparent in a visible region; a third layer composed of an MgF₂ film stacked on said second layer; a fourth layer stacked on said third layer to satisfy 1.97≦k₄ ≦2.15; and a fifth layer stacked on said fourth layer to satisfy 0.93≦k₅ ≦1.05.
 2. A material according to claim 1, wherein said fifth layer is an MgF₂ film.
 3. A material according to claim 1, wherein said fourth layer is composed of a compound selected from the group consisting of PrTiO₃, TiO₂, ZrTiO₄, ZrO₂ and Ta₂ O₅.
 4. A material according to claim 1, wherein said transparent substrate is a glass substrate.
 5. A material according to claim 1, wherein said metal oxide film is selected from the group consisting of a PrTiO₃ film, an SiO₂ film, and an Al₂ O₃ film. 